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|hSʯӢƷ޹˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%ϡ ҹ˾1998ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢʯӢpʯӢʯӢ׹ܡʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢʯӢܡʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ ʯӢܰNҎ(gu)͸UV⾀ʯӢܼpʯӢֱ2-180mmں񷶇0.5-8mmL10-3000mmBʯӢܡÓuV⾀oͨB۹SiO2_99.6%׺γߴW(xu)(wn)ԡ᷀(wn)׃ԺͿ܃(yu)W(xu)͸^_93%Óuu10ppm(jng)^Óuu_5ppm£mڸ߉cuȵua(chn)Ʒ;׹֮¹ˇa(chn)Ʒıڰl(f)ӟhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)Դ죻ocV ⾀෴͸^253.7nmҲL⾀ǟo⾀ҪϣVڽеˮ̎ʳƷl(wi)Ț; ʯӢƷʯӢʯӢݚʯӢ׹ʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀Nɫ͸Ͳ͸ʯӢʯӢ׹ֱ8-120mm֮gІ_ڡp_A^ƽ^κ͔Uڡsڡ߅ĥɰȼӹ͸ߜ͸g͸Ժüc,VʹˮO(sh)ӟܡˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëܣMŚ⣬͸ߜ͸ԺҪJCJDH1-H7_͸߉cuȮa(chn)Ʒ; ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿġȡ՚C\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)Mg(sh)_l(f)®a(chn)ƷЧY(ji)(gu)·fLrܮa(chn)L253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖã@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ˵Ҫ ҂Įa(chn)Ʒ|(zh)_˳Ҏ(gu)񣬲ҿԞ͑MЁDϼӹ ҏSĮa(chn)Ʒ60N󲿷և20Һ͵؅^(q)S\ź|(zh)棬пƼ(chung)l(f)չ҂÷dzŬȥM͑҂ø|(zh)̓rĮa(chn)Ʒ(yng)҂Ŀ͑׌҂Ŀ͑ڸЈϾиĸ

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