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ҹ˾a(chn)ʯӢܰNҎ(gu)͸UV⾀ʯӢܼpʯӢֱ2-180mmں񷶇0.5-8mmL10-3000mmBʯӢÓuܡV⾀oܡͨB۹SiO2_99.6%ϣ׺γߴW(wn)᷀(wn)׃ԺͿ܃(yu)W͸^_93%Óuu10ppm(jng)^Óuu_5ppmmڸ߉cuȵua(chn)Ʒ;׹֮¹ˇa(chn)Ʒı棬ڰl(f)ӟhtܵ죻V⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴͸^253.7nmҲL⾀ǟo⾀ҪVt(y)еˮ̎ʳƷl(wi)Ț

|hSʯӢƷ޹˾Ϣ

|hSʯӢƷ޹˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVأƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95% ҹ˾1998ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢʯӢpʯӢܡʯӢ׹ʯӢˮסʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢʯӢʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ ʯӢܰNҎ(gu)͸UV⾀ʯӢܼpʯӢֱ2-180mmں񷶇0.5-8mmL10-3000mmBʯӢÓuܡV⾀oͨB۹SiO2_99.6%ϣ׺γߴW(wn)᷀(wn)׃ԺͿ܃(yu)W͸^_93%Óuu10ppm£(jng)^Óuu_5ppmmڸ߉cuȵua(chn)Ʒ;׹֮¹ˇa(chn)Ʒıڰl(f)ӟܡhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴͸^253.7nmҲL⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț; ʯӢƷʯӢʯӢݚʯӢ׹ʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀Nɫ͸Ͳ͸ʯӢʯӢ׹ֱ8-120mm֮gІ_p_A^ƽ^κ͔Usڡ߅ĥɰȼӹ͸ߜ͸g͸Ժüc,VʹˮO(sh)䡢ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëMŚ͸ߜ͸ԺҪJCJDH1-H7_͸߉cuȮa(chn)Ʒ; ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿġȡ՚C\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)Mg(sh)_l(f)®a(chn)ƷЧY(ji)(gu)·fLrܮa(chn)L253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ˵Ҫ ҂Įa(chn)Ʒ|(zh)_ϣ˳Ҏ(gu)񣬲ҿԞ͑MЁDϼӹ ҏSĮa(chn)Ʒ60N󲿷և20Һ͵؅^(q)S\ź|(zh)пƼ(chung)l(f)չ҂÷dzŬȥM͑҂ø|(zh)̓rĮa(chn)Ʒ(yng)҂Ŀ͑׌҂Ŀ͑ڸЈϾиĸ

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