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|hSʯӢƷ޹˾λڴʯӢƷɢ-BƸЖ|h|hN(yn)SʯӢVƷλஔ(dng)ߣ_(d)99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ(chng)~ռ95% ҹ˾1998꣬ʯӢƷa(chn)н(jng)(yn)λҪa(chn)ƷʯӢܡʯӢpʯӢܡʯӢ׹ʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢܡʯӢʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ ʯӢܰNҎ(gu)͸⡢UV⾀ʯӢܼpʯӢֱ2-180mmں񷶇0.5-8mmL(zhng)10-3000mmBʯӢÓuܡV⾀oܡͨB۹SiO2_(d)99.6%׺γߴW(xu)(wn)᷀(wn)׃ԺͿ܃(yu)W(xu)͸^_(d)93%Óuu10ppm(jng)^Óuu_(d)5ppm£mڸ߉cuȵua(chn)Ʒ;׹֮¹ˇa(chn)Ʒı棬ڰl(f)ӟh(yun)tܵV⾀ܞVVЌ(du)wк190-320nmL(zhng)⾀mڭh(hun)ԴocV ⾀෴͸^253.7nmҲL(zhng)⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț; ʯӢƷʯӢʯӢݚʯӢ׹ʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀Nɫ͸Ͳ͸ʯӢܡʯӢ׹ֱ8-120mm֮gІ_p_ڡA^ƽ^κ͔U(ku)ڡs߅ĥɰȼӹ͸ߜ͸g͸Ժüc(din),VʹˮO(sh)ӟܡˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽë(x)M(jn)Ś͸ߜ͸ԺҪJCJDH1-H7_(ti)͸߉cuȮa(chn)Ʒ; ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚C(j)\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)M(jn)g(sh)_l(f)®a(chn)ƷЧ(qing)Y(ji)(gu)·fL(zhng)r(sh)ܮa(chn)L(zhng)253.7nmȏ(qing)⾀ݗ䏊(qing)100W/cm2,(du)(x)ÓǺ(DNA)^(qing)Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)(xing)ָ(bio)Ҫ ҂Įa(chn)Ʒ|(zh)_(d)(bio)˳Ҏ(gu)񣬲ҿԞ͑M(jn)ЁDϼӹ ҏSĮa(chn)Ʒ60N󲿷և20(g)Һ͵؅^(q)S\ź|(zh)棬пƼ(chung)l(f)չ҂(hu)÷dzŬȥM͑҂ø|(zh)̓r(ji)Įa(chn)Ʒ(yng)҂Ŀ͑׌҂Ŀ͑ڸ(jng)(zhng)Ј(chng)Ͼи(qing)ĸ(jng)(zhng)

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