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|hAʯӢƷ޹˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVأƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾2000꣬ʯӢƷaнλҪaƷʯӢʯӢpʯӢʯӢ׹ʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢʯӢʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)͸⡢UV⾀ʯӢܼpʯӢֱ2-180mmں񷶇0.5-8mmL10-3000mmBʯӢÓuV⾀ܡoͨB۹SiO2_99.6%׺γߴW(wn)᷀(wn)ԡ׃ԺͿ܃(yu)W͸^_93%ϣÓuu10ppm^Óuu_5ppm£mڸ߉cuȵuaƷ;׹֮¹ˇaƷıڰl(f)ӟܡhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴͸^253.7nmҲL⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢ׹ʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀Nɫ͸Ͳ͸ʯӢʯӢ׹ֱ8-120mm֮gІ_p_A^ƽ^κ͔Usڡ߅ĥɰȼӹ͸ߜء͸g͸Ժüc,VʹˮOӟˮ̎uȮaƷͭh(hun)l(wi)IʯӢݚҎ(gu)8-180mmΠ͑ҪݚϿԽëMŚ͸ߜأ͸ԺҪJCJDH1-H7_͸߉cuȮaƷ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚C\gĹ̻gӡˢͰbӹI(y)ѽõVͳʯӢ⾀ϵÇMg_l(f)®aƷЧY·fLrܮaL253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)gҎ(gu)ָ˵Ҫ
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