|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVأƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾2000꣬ʯӢƷaнλҪaƷʯӢʯӢpʯӢʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢʯӢʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)⡢UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢÓuV⾀ܡoͨB۹SiO2_99.6%γߴW(wn)᷀(wn)ԡ׃ԺͿ܃(yu)W^_93%ϣÓuu10ppm^Óuu_5ppm£mڸ߉cuȵuaƷ;֮¹ˇaƷıڰl(f)ӟܡhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_A^ƽ^κ͔Usڡ߅ĥɰȼӹߜءgԺüc,VʹˮOӟˮ̎uȮaƷͭh(hun)l(wi)IʯӢݚҎ(gu)8-180mmΠ͑ҪݚϿԽëMŚߜأԺҪJCJDH1-H7_߉cuȮaƷ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚C\gĹ̻gӡˢͰbӹI(y)ѽõVͳʯӢ⾀ϵÇMg_l(f)®aƷЧY·fLrܮaL253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)gҎ(gu)ָ˵Ҫ
҂ĮaƷ|_˳Ҏ(gu)ҿԞ͑MЁDϼӹ