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a(chn)ƷB ITOIndium Tin Oxides{aкܺõČԺДwкݗ⾀ht⾀Ϳڲϼ@ʾϺԺԵͬrДwкݗ估⡢t a(chn)Ʒc WԣChemical Element Composition In2O3+SnO2:In2O3:90.0(5)wt.% SnO2:10.0(5)wt.% ƼȣPurity:99.99% Elements Al As Ca Cd Cu Fe In Ni Si Sn Ti Zn Analysis(ppm) 3.49 3.72 13.80 4.24 1.74 0.74 745651.31 1.75 5.37 76867.66 0.38 1.49 űɫ Blue ܶȣDensity SɢIJͬܶҲͬ Փܶȣ7.16g/cm3 ^(q) ܶ(g/cm3) Ϳӷ ܶ 4.30.5 E-Beam ܶ 5.30.5 Evaporation ܶ 7.0 E-beam, Sputtering һ20-30nm 50-60nm Ȍԣ1-210-4 .cm ԣ{(dio) ɱȱe 300-350O/g
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